Welcome!
NEWSThe Cleanroom is currently down for renovations. Expected to be complete in January 2026. If a tool is still online in iLab, then that means it is still available for use and the location is in the tool description. Contact Greg or James for access. If the tool is offline, you will not be able to schedule it.
Overview of ServicesThe Nano Fabrication Center is one of the University of Arizona's Research, Innovation and Impact (RII) cores, and supports and enhances the research, education and public service missions of the University. The Center is open and flexible, enabling researchers to endeavor in fabrication and enabling private enterprise to research, develop, prototype and produce their products. The CleanroomThe NFC houses 4000 sq. ft. of Class 10 & Class 100 cleanroom space, plus 10,000 sq. ft. of class 10,000 chase area. NFC AcknowledgementsAcknowledgements of NFC are valuable to future funding. On your papers, presentations and posters, please include an acknowledgement such as the one suggested below: "This work was performed in part at the Nano Fabrication Center at the University of Arizona" Leadership |
Dr. Greg Book | Director | book@arizona.edu | 520-626-1524
James Bohlman | Engineer | jimbob1@arizona.edu
| Hours | Location |
|
Monday - Friday 8:00AM - 5:00PM 24 Hour Access Available |
Electrical and Computer Engineering Bldg 1230 E Speedway Blvd Room 230F Tucson, AZ 85721-0104 |
Araca, Inc: Safe Extraction of Spent Slurry During the CMP Process | LinkedIn
| Name | Role | Phone | Location | |
|---|---|---|---|---|
| Core Facility Business Office |
Billing Inquiries
|
520-621-4064
|
CoreBusiness@email.arizona.edu
|
Keating Room 200
|
| ► Cleaning (3) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Deposition (7) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Lithography (6) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Metrology (11) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Oxidation & Annealing (2) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Packaging (2) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Plasma Etching (2) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
| ► Wetsinks (1) | |||||||||||||||||||||||||||||||||||||||||||||
|
|||||||||||||||||||||||||||||||||||||||||||||
