ALERT

ATTENTION ⚠️

 

The iLab support portal will undergo scheduled maintenance on Wednesday, April 1, from 6:00–7:00 AM UTC.

During this one‑hour window, the portal may be temporarily unavailable for submitting or viewing requests. Email support will remain available during this time.

For urgent requests, please email us at ilabsupport@agilent.com and include “URGENT” in the subject line. All other inquiries will be addressed promptly once services are restored.

Thank you for your understanding.

Nanofabrication Core Facility

 

NEWS

The Cleanroom is OPEN.  There are limited tools available now.  iLab shows which tools are available.

Overview of Services

The Nanofabrication Core Facility is one of the University of Arizona's Office of Research and Partnerships cores, and supports and enhances the research, education and public service missions of the University. The Center is open and flexible, enabling researchers to endeavor in fabrication and enabling private enterprise to research, develop, prototype and produce their products.

The Cleanroom

The NFC houses 6800 sq. ft. of ISO5 cleanroom space.

NFC Acknowledgements

Acknowledgements of NFC are valuable to future funding.  On your papers, presentations and posters, please include an acknowledgement such as the one suggested below:

"This work was performed in part at the Nano Fabrication Center at the University of Arizona"

Leadership


Dr. Greg Book | Director | book@arizona.edu | 520-626-1524

James Bohlman | Engineer | jimbob1@arizona.edu

 

Hours of Operation and Location

Hours Location

Monday - Friday 

8:00AM - 5:00PM   

24 Hour Access Available 

Electrical and Computer Engineering Bldg

1230 E Speedway Blvd

Room 230F

Tucson, AZ 85721-0104

Links and Resources

  1. See us on the web.

 

Publications

Araca, Inc:  Safe Extraction of Spent Slurry During the CMP Process | LinkedIn

 

Contacts

Name Role Phone Email Location
Core Facility Business Office
Billing Inquiries
 
520-621-4064
 
CoreBusiness@email.arizona.edu
 
Keating Room 200
 

Available Equipment and Resources

Cleaning (3)
Conference Room (1)
Deposition (8)
Lithography (6)
Metrology (14)
Oxidation & Annealing (2)
Packaging (2)
Plasma Etching (2)
Wetsinks (1)

Map