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Micro/Nano Fabrication Center


Bunny Suit

Overview of Services


The Micro/Nano Fabrication Center (MFC) is a flexible foundry, offering industrial space & facilities, industrial cleanroom space & facilities, device processing & characterization equipment.  We have academic & industrial users working in the areas of semiconductors, bioengineering, MEMS, optics, and thermoelectrics. The Center has assisted multiple companies with feasibility studies, prototyping, product development, deferment of major capital expenses, and short courses.


Class 10 & 100 Cleanroom Space

The MFC has 4,000 sq. ft. of work area available in our Class 10 & Class 100 cleanroom, equipped with acid & solvent exhaust, easy access to power, nitrogen, DI water, drain to the neutralization system, and space for vacuum pumps in the immediate chase area.


Class 10,000 Space

The MFC's Class 10,000 chase area of approximately 10,000 sq. ft. has access to acid & solvent exhaust, easy access to power, nitrogen, DI water, drainage to our neutralization system, and space for vacuum pumps.


High Capacity Ultra-pure Water

We can supply thousands of gallons of 18 Mohm ultra pure water to our users.


Waste Treatment

We can neutralize wet bench waste streams without the need for users to collect their waste. This is a great feature allowing users to install and operate their own wet benches and processing equipment.


Education at MFC


We provide our clients with an extensive processing background to help them with their research & developement activity. We train users to safely operate our equipment. We conduct regular free workshops focused on certain capabilities of interest. We also support & assist faculty with lab courses requiring the use of the Center's facility and equipment. Our educational efforts in preparing students for industry were recently acknowledged by the Arizona Daily Star.


Research at MFC


Several Advanced research projects are currently underway at the Center. These include projects sponsored by The National Science FoundationSRC, and industrial sponsors such as Intel Corp. The Center is closely associated with the research activities under the SRC Center for Environmentally Benign Semiconductor Manufacturing.


MFC as an Industrial Resource


Companies in Southern Arizona and beyond have successfully utilized MFC's space, instruments, and staff expertise to obtain cost effective solutions to key technical problems. Local technology companies such as Araca Inc.NovaIR and IRLAbs are prime examples of how we can help companies achieve their manufacturing goals.



Dr. Greg Book |

Dr. Kenneth Nebesny | Director

Hours of Operation and Location

Hours Location

Monday - Friday 

8:00AM - 5:00PM   

24 Hour Access Available 

Electrical and Computer Engineering Bldg

1230 E Speedway Blvd

Room 230F

Tucson, AZ 85721-0104

Links and Resources

  1. See us on the web.


Name Role Phone Email Location
Core Facility Business Office
Billing Inquiries
Keating Room 200